Project

General

Profile

Actions
Copy link

Feature #10

closed

DieMp:Stitch按钮执行拼接扫描路径路径规划，扫描路径暂定是矩形然后以弓字形的路径运行

Added by yanhua over 2 years ago. Updated about 2 years ago.

Status:
Closed
Priority:
Normal
Assignee:
yanhua
Start date:
08/17/2022
Due date:
% Done:

100%

Estimated time:
(Total: 0.00 h)
Spent time:
24.00 h (Total: 32.00 h)

Description

"1、根据校准的spin chuck center 以及wafer尺寸，计算出扫描范围。
2、根据选择的物镜、相机的尺寸、重叠率，得到XY方向的扫描
3、根据1、2计算出每一行的扫描的起点和终点坐标"

Subtasks 2 (0 open — 2 closed)

Feature #22: codingClosedyanhua08/17/2022

Actions
Feature #23: testClosedyanhua08/17/2022

Actions
Actions
Copy link
 #1

Updated by yanhua over 2 years ago

我们按照5%的重叠率（放到参数），相机尺寸固定，根据选择的镜头，获取像元标定的文件，计算出行高
图像的宽高可以去像元的标定文件获取

Actions
Copy link
 #2

Updated by yanhua over 2 years ago

  • Status changed from New to In Progress
  • Assignee set to yanhua
Actions
Copy link
 #3

Updated by hua over 2 years ago

  • Subject changed from DieMp:Stitch按钮执行拼接扫描路径路径规划，扫描路径暂定是矩形然后以工字形的路径运行 to DieMp:Stitch按钮执行拼接扫描路径路径规划，扫描路径暂定是矩形然后以弓字形的路径运行
Actions
Copy link
 #4

Updated by hua over 2 years ago

发现2个问题，一个是图片张数，测一行的统计张数比用公式算出来的要少一张，2.测晶圆最中间那行时，发现圆周有一边没采集到，不知是那个chuck center有点偏，还是相机偏导致的问题

Actions
Copy link
 #5

Updated by yanhua over 2 years ago

  • Status changed from In Progress to Resolved
Actions
Copy link
 #6

Updated by yanhua about 2 years ago

  • Status changed from Resolved to Closed
Actions
Copy link

Also available in: Atom PDF